Last Updated
11 January, 2006
The ITRS microelectronic roadmap presents a rather clear vision
of the near future of microelectronic technology within about
ten years. Beyond this date, the MOSFET channel should be shrunken
down to 20 nm, near its critical length. Thus to keep on scaling
down, microelectronic industry will be up against MOSFET replacement
by another elementary component. The far future technology is
still open from both point of views of component and fabrication
processes. Concerning the short term future of microelectronics,
a 'red brick wall' planned in 2006 on Moore's graph : beyond this
year there are no known solutions for most technical areas and
essential research breakthroughs are needed.
A great effort has been devoted this
last decade to design and modelling of electronic devices based
on quantum effects as alternative solutions for MOSFET replacement
in memories. Several ideas were emerging such as molecular switches,
single electron devices, etc. In all cases, the fabrication of
the key part of the device requires a lithography step with a
resolution at sub-10 nm scale. If direct writing lithography processes
(top-down approaches) are very promising technologies for demonstrators
fabrication, the mass production should undoubtedly rely on self-assembly
techniques (bottom-up approaches). In all cases one of the major
bottleneck in research development remains in demonstrator fabrication
since no technology is presently available for the addressing
of an individual function associated to a nano-object (nano to
micro bonding).
The general purpose of this workshop
was to gather researchers interested in the design and fabrication
of nano-devices. The association of researchers working in theory,
design/modelling and on ultimate lithography processes (top-down,
bottom-up and coupling of both techniques) was an opportunity
for fruitful discussions.
A full day presentation organised in collaboration with
the PHANTOMS network
was devoted to speakers from private companies, IC producers
or equipment suppliers.
In addition, EU project reviews and
Working Groups corresponding to the 14th NID Workshop were organised in parallel with the "Ultimate Lithography and Nanodevice
Engineering" Conference.
Topics of interest for the conference
were the following:
Ultimate Lithography
|
Nanodevices
|
-
EUV
-
SPM Lithography
-
E-beam Lithography
-
Ion-beam Lithography
-
Nanoimprint
-
Self-organisation
-
Bottom-up
-
Nanoinstrumentation
|
|
Lines of gold nanodots
deposited by STM assisted lithography (Courtesy: Prof. Didier
Tonneau, CRMCN (France))